Semi-Automatic Probe Station
Supports automatic XYZ-axis movement for multiple wafer sizes to achieve precise alignment, ideal for high-volume on-wafer DC and RF testing, improving test efficiency and consistency.
- Wafer SizeSupports 6-inch to 12-inch wafers, with custom fixtures available for non-standard products
- Alignment AccuracyBetter than 1 μm
Product Overview
The semi-automatic probe station integrates automatic movement, enabling it to automatically move the probes, run tests and adjust focus according to the user's test program, greatly reducing manual operation and improving the efficiency and consistency of high-volume wafer-level DC and RF testing.
It is suited to volume production testing, process monitoring and wafer-level verification, and can be flexibly configured with DC/RF probes and test systems. High/low-temperature and vacuum test options are also available, delivering efficient and reliable test solutions for production lines and laboratories.
Key Features
Automatic Movement
Automatic XYZ-axis movement, supporting automated testing of multiple wafer sizes.
High-Precision Alignment
Automatic alignment accuracy better than 1 μm, for accurate positioning.
High-Volume Testing
Ideal for high-volume wafer-level DC and RF testing.
Improved Efficiency
Reduces manual operation, significantly improving test efficiency and consistency.
Flexible Compatibility
Can be flexibly configured with DC/RF probes and test systems.
Modular Design
Supports optional high/low-temperature and vacuum test capabilities.