Manual Probe Station
The MPN series probe stations are fully featured and highly compatible, meeting the testing needs of samples of various sizes — especially large samples such as 8-inch and 12-inch wafers — and supporting different application scenarios such as DC and RF.
- Travel RangeX/Y travel approx. 150 mm (6-inch), accuracy better than 1 μm
- Sample SizeCompatible with 6-inch to 12-inch samples
Product Overview
The MPN series waveguide probe station is a high-precision manual probe station system designed for wafer-level testing in the millimeter-wave and terahertz bands. With a stable structure and intuitive operation, it is widely used for high-frequency differential testing and multi-port calibration in fields such as 5G/6G communication chips, RF MMICs, radar modules and advanced packaging.
The system features a high-rigidity structural design, combined with air-bearing/precision lead-screw positioning stages (accuracy better than 1 μm) and a large-travel stage (compatible with 6-inch to 12-inch samples), stably supporting S-parameter testing requirements at 110 GHz and above. The modular probe holder platform is compatible with various RF (coaxial, waveguide) and DC probes, and can be upgraded to a high/low-temperature test system, providing flexible and reliable solutions for research and volume production testing.
Key Features
Large Stage
Compatible with 6-inch to 12-inch samples, meeting the testing needs of large wafers.
High-Precision Positioning
X/Y axes with air-bearing movement, coarse travel of 6 inches and fine adjustment accuracy better than 1 μm; Z-axis travel of 13 mm.
Professional Microscope System
Equipped with a professional microscope for intuitive operation and precise alignment.
Modular Probe Holder Platform
Compatible with various RF (coaxial, waveguide) and DC probes, supporting a variety of test applications.
High/Low-Temperature Expansion
Optional high/low-temperature test system to cover more application scenarios.
Shock Resistance and Stability
High-rigidity structural design ensures stable and reliable measurement.